Specialty Gas System (SGS)

Process Flow Diagram

Technical Reserve

Adopting ultra-high purity welding processes and intelligent gas supply regulation technology, achieve special gas transportation with purity stability ≥99.9999% and leakage rate ≤1×10⁻⁹ Pa·m³/s, meeting the strict impurity control standards of the semiconductor industry.

1、Gas Purification Technology: Adsorption/catalysis processes remove impurities to ppb levels, ensuring gas supply purity.

2、Intelligent Pressure Regulation: Adaptively matches flow and pressure, with purity fluctuation ≤0.1%.

3、Green Tail Gas Treatment: SCR catalytic reduction technology reduces NOx emissions to ≤5 ppm.

Industrialization Advantages

With standardized modules and rapid-response services, support efficient implementation in strict gas supply scenarios.

1、Extreme Cold Environment Adaptation: EP-grade distribution pipes and valve boxes support operation at -40℃, with deployment cycle ≤15 days.

2、Global Instrument Collaboration: Stable supply of Endress+Hauser detection equipment significantly enhances system reliability.

3、Real-time Safety Protection: Dual-redundancy leakage monitoring + 4-hour fault recovery ensures continuous production.

Related products

Valves